MICROMEASURE
Multi
Axes Measuring System
|
Technical Specifications(기술사양)
High
Resoultion Optical Sensor CHR
150
|
|
Objective
Lenses
|
|
Depth
of filed
|
0
- 20 ㎛
|
0
- 80 ㎛
|
0
- 300 ㎛
|
0
- 3 ㎛
|
|
Working
Distance
|
0.6
mm
|
1
mm
|
4.5
mm
|
38
mm
|
|
Z
axis resolution
|
0.0007
㎛
|
0.003
㎛
|
0.01
㎛
|
0.1
㎛
|
|
Measuring
Spot dia.
|
1
㎛
|
0.8
㎛
|
2
㎛
|
10
㎛
|
Dimension
: Request for Hanmi-MTI(한미에 문의하시면
최선을 다하겠습니다)
| Fiberoptic
Link
|
|
Type
|
Step
index
|
|
Fiber
length
|
2
meters
|
|
Optical
connectors
|
FC/PC
type
|
| Optoelectronic
cabinet
|
|
Power
Supply
|
220
- 60 Hz
|
|
Consumption
|
100
Watts
|
|
Light
sorce
|
Halogene
50 Watts bulb
|
|
Measuring
frequency
|
30,100,300
and 1000Hz
|
|
Data
processing
|
Embedded
DSP board
|
|
Linearity
|
Better
than +/- 0.1%
|
|
Analog
outputs
|
0
- 10V
|
|
Digital
outputs
|
serial
RS 232
|
MICROMEASUE
STATION
|
MICROSTEP
High resolution translation
stages
|
|
X
and Y axes travel
|
100
mm
|
|
Z
axis travel
|
50
mm
|
|
X
and Y axes resolution
|
Batter
than 0.1 ㎛
|
|
Z
axis resolution
|
Better
than 0.01 ㎛
(Heidenhain optical linear encoder)
|
|
Max
X,Y axes speed
|
20
mm/sec
|
|
Dedicated
software
|
MICROMAP
|
|